| 1. |
High-speed, with minimized space, vibration and noise. |
| 2. |
SEMI M12, T7 and M1.15 compliant. |
| 3. |
It can read both the top and reverse sides of a wafer. |
| 4. |
A combination of optical and image processing gives high ID recognition. |
| 5. |
Excellent cleanliness due to ferro fluidic seal and fully enclosed drum cover. |
| 6. |
Using the edge clamp type end-effector for holding a wafer, it prevents particle attachment on the back side of wafer. |
| 7. |
Based on the visible airflow analysis, we put in a pressure separation plate for decreasing particle generation around the transferring section. |
| 8. |
Dual arm robot provides high speed handling to and from any stage. |
| 9. |
Optimal acceleration/deceleration provided by Rorze's new model controllers. |
| 10. |
The number of the robots and loadports can be customized. |
